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CMOS-MEMS Capacitive Humidity Sensor

✍ Scribed by Lazarus, Nathan; Bedair, Sarah S.; Lo, Chiung-C.; Fedder, Gary K.

Book ID: 120028779
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 1019 KB
Volume: 19
Category: Article
ISSN: 1057-7157
DOI: 10.1109/JMEMS.2009.2036584

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