CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS

✍ Scribed by Sundararajan, Ananiah Durai (author);Rezaul Hasan, S. M. (author)

• Book ID: 120558604
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 716 KB
• Volume: 20
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-013-1818-8