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CMOS-Compatible Micromachined Toroid and Solenoid Inductors With High $Q$-Factors

✍ Scribed by Zine-El-Abidine, Imed; Okoniewski, Michal

Book ID
120244753
Publisher
IEEE
Year
2007
Tongue
English
Weight
217 KB
Volume
28
Category
Article
ISSN
0741-3106

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## Abstract This article reports on‐chip micromachined solenoidal inductors with high radio‐frequency (RF) performance. The RF components can be either used in multi‐GHz telecommunication modules with a system in package scheme or monolithically integrated in RFICs with a post‐CMOS integration meth