Design and fabrication of deep submicron CMOS technology compatible suspended high-Q spiral inductors

✍ Scribed by Ming-Chun Hsieh; Yean-Kuen Fang; Chung-Hui Chen; Shuo-Mao Chen; Wen-Kuan Yeh

• Book ID: 114617348
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 845 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2003.822864