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Cleaning of Silicon and Steel Surfaces Using Dielectric Barrier Discharges

✍ Scribed by Rudolf Thyen; Kartin Höpfner; Niklas Kläke; Claus-Peter Klages


Book ID
110275074
Publisher
Springer
Year
2000
Tongue
English
Weight
314 KB
Volume
5
Category
Article
ISSN
1084-0184

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Atmospheric pressure plasma was generated using a modified dielectric barrier discharge (pin-to-plate DBD) with the power electrode consisting of multi-pins instead of a conventional blank planar plate. The discharge and amorphous silicon (a:Si) etching characteristics of the pinto-plate DBD were co