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Plasma cleaning and activation of silicon surface in Dielectric Coplanar Surface Barrier Discharge

✍ Scribed by Pamreddy, Annapurna; Skácelová, Dana; Haničinec, Martin; Sťahel, Pavel; Stupavská, Monika; Černák, Mirko; Havel, Josef

No coin nor oath required. For personal study only.

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