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Cleaning and Surface Preparation for SiGe and Ge Channel Device

✍ Scribed by Wada, Masayuki; Takahashi, H.; Snow, James; Vos, Rita; Conard, Thierry; Mertens, Paul W.; Shirakawa, H.

Book ID: 120401517
Publisher: Trans Tech Publications, Ltd.
Year: 2012
Tongue: English
Weight: 272 KB
Volume: 187
Category: Article
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/SSP.187.19

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