๐”– Bobbio Scriptorium
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Classical simulation of atomic beam focusing and deposition for atom lithography

โœ Scribed by Xianzhong Chen; Hanmin Yao; Xunan Chen


Book ID
115366945
Publisher
Optics InfoBase
Year
2004
Tongue
English
Weight
476 KB
Volume
2
Category
Article
ISSN
1671-7694

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๐Ÿ“œ SIMILAR VOLUMES


Simulations of thin film deposition from
โœ G.H. Gilmer; C. Roland; D. Stock; M. Jaraiz; T. Diaz de la Rubia ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 859 KB

We have simulated silicon thin film growth from energetic beams using molecular dynamics methods. We find that the kinetic energy of the beam has a dramatic effect on the amount of amorphous or cystalline material in the resulting deposit. In some cases energetic beams can produce a crystalline stru