✦ LIBER ✦
Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography
✍ Scribed by R.R. Chaustowski; V.Y.F. Leung; K.G.H. Baldwin
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 378 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0721-7269
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