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(ClAlNH)n cluster formation in the gas phase for the chemical vapor deposition of AlN thin films

✍ Scribed by Xiao-Hong Xu; Hai-Shun Wu; Fu-Qiang Zhang; Cong-Jie Zhang; Zhi-Hao Jin

Book ID
114141426
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
148 KB
Volume
542
Category
Article
ISSN
0166-1280

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