✦ LIBER ✦
Approximate model of the deposition of thin films from vapor-gas phase in a tubular diffusion furnace
✍ Scribed by G. I. Georgiev; S. G. Karbanov; G. A. Peev
- Publisher
- Springer US
- Year
- 1987
- Tongue
- English
- Weight
- 277 KB
- Volume
- 52
- Category
- Article
- ISSN
- 1573-871X
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