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Circuit design and parameters in thin film technology


Publisher
Elsevier Science
Year
1963
Tongue
English
Weight
43 KB
Volume
13
Category
Article
ISSN
0042-207X

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The borides of transition and rare-earth metals are considered for application as wear-and corrosion-resistant, decorative or thermionic coatings. After a review of physical vapor deposition (PVD) techniques used for the deposition of these coatings, a survey of investigations to apply these coating

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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp