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ChemInform Abstract: Wet and Dry Etching of LiGaO2 and LiAlO2.

✍ Scribed by J. W. LEE; S. J. PEARTON; C. R. ABERNATHY; J. M. ZAVADA; B. L. H. CHAI

Book ID: 112041168
Publisher: John Wiley and Sons
Year: 2010
Weight: 29 KB
Volume: 27
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.199649272

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