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ChemInform Abstract: Dry Etching of Magnetic Materials

✍ Scribed by K. B. Jung; H. Cho; S. J. Pearton

Publisher: John Wiley and Sons
Year: 2001
Weight: 23 KB
Volume: 32
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200108249

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