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ChemInform Abstract: Titanium Nitridation on Copper Surfaces.

โœ Scribed by S. W. RUSSELL; M.-J. RACK; D. ADAMS; T. L. ALFORD; T. E. LEVINE; M. NASTASI


Book ID
112040276
Publisher
John Wiley and Sons
Year
2010
Weight
31 KB
Volume
27
Category
Article
ISSN
0931-7597

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ChemInform Abstract: Particle-Precipitat
โœ J. P. DEKKER; P. J. VAN DER PUT; H. J. VERINGA; J. SCHOONMAN ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons โš– 25 KB ๐Ÿ‘ 2 views

Particle-Precipitation-Aided Chemical Vapor Deposition of Titanium Nitride. -The title process (PP-CVD) is studied for the deposition of TiN. It consists of formation of an aerosol, particle deposition driven by thermophoresis, and interconnection or sintering of the particles. PP-CVD enables the f