Metal-Organic Chemical Vapor Deposition
β
W. J. DeSisto; E. J. Cukauskas; B. J. Rappoli; J. C. Culbertson; J. H. Claassen
π
Article
π
1999
π
John Wiley and Sons
π
English
β 247 KB
π 2 views
Composition-controlled metal-organic chemical vapor deposition of La 2 CuO 4 thin films using ultraviolet absorption sensors to provide incoming precursor flux control is reported. These sensors provide a more flexible and sensitive alternative to ultrasonic sensors. The films were c-axis oriented a