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Chemical vapour deposition on silicon: In situ surface studies

✍ Scribed by J.S. Foord; R.B. Jackman

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 425 KB
Volume: 112
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(84)85020-4

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