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Chemical vapor deposition of hexagonal boron nitride films in the reduced pressure

✍ Scribed by Byung-jin Choi

Book ID: 114065358
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 219 KB
Volume: 34
Category: Article
ISSN: 0025-5408
DOI: 10.1016/s0025-5408(00)00156-2

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