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Chemical vapor deposition growth and properties of TaCxNy

✍ Scribed by E.R Engbrecht; Y.-M Sun; S Smith; K Pfiefer; J Bennett; J.M White; J.G Ekerdt

Book ID
108388490
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
657 KB
Volume
418
Category
Article
ISSN
0040-6090

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