Growth kinetics of laser chemical vapor
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T. Szörényi; K. Piglmayer; D. Bäuerle
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Article
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1990
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Elsevier Science
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English
⚖ 487 KB
The analysis of the time evolution of W spots deposited from WF6+H2 mixtures by an Ar+ laser reveals that at different partial pressure ratios different chemical pathways are preferred. For high p(H2)/p(WF6) ratios the rate limiting step is hydrogen desorption from the tungsten surface with an activ