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Chemical modification of the electrical properties of hydrogenated amorphous carbon films

✍ Scribed by B. Meyerson; F.W. Smith

Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
281 KB
Volume
34
Category
Article
ISSN
0038-1098

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An actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentra