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Effect of oxygen on hydrogenated amorphous carbon films

✍ Scribed by Yoshihito Suefuji; Yoshikazu Nakamura; Yoshihisa Watanabe; Shigekazu Hirayama; Kazunori Tamaki


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
351 KB
Volume
236
Category
Article
ISSN
0040-6090

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An actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentra