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Chemical Mechanical Polishing in Elastic Contact and Partial Hydrodynamic Lubrication: Modeling and Experiments

✍ Scribed by Tsai, Hung-Jung; Huang, Pay-Yau; Tsai, Hung-Cheng; Chiu, Shun-Jung


Book ID
119992642
Publisher
Taylor and Francis Group
Year
2011
Tongue
English
Weight
508 KB
Volume
26
Category
Article
ISSN
1042-6914

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