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Chemical mechanical polishing characteristics of ITO thin film prepared by RF magnetron sputtering

✍ Scribed by Kang-Yeon Lee; Gwon-Woo Choi; Yong-Jae Kim; Youn-Ok Choi; Nam-Oh Kim


Book ID
111857291
Publisher
The Korean Physical Society
Year
2012
Tongue
English
Weight
397 KB
Volume
60
Category
Article
ISSN
0374-4884

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