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Chemical and phase compositions of silicon oxide films with nanocrystals prepared by carbon ion implantation

✍ Scribed by A. V. Boryakov; D. E. Nikolitchev; D. I. Tetelbaum; A. I. Belov; A. V. Ershov; A. N. Mikhaylov

Book ID: 114992472
Publisher: SP MAIK Nauka/Interperiodica
Year: 2012
Tongue: English
Weight: 321 KB
Volume: 54
Category: Article
ISSN: 1063-7834
DOI: 10.1134/s1063783412020102

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