Charge carrier lifetime modification in silicon by high energy H+ or He+ ion implantation

✍ Scribed by N.Q. Khánh; P. Tüttő; O. Buiu; E.N. Jároli; L.P. Bíró; A. Manuaba; J. Gyulai

• Book ID: 114168945
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 434 KB
• Volume: 127-128
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)01117-2