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Characterizations of CNx thin films made by ionized physical vapor deposition

✍ Scribed by F. Tétard; P. Djemia; M.P. Besland; P.Y. Tessier; B. Angleraud

Book ID
108287738
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
320 KB
Volume
482
Category
Article
ISSN
0040-6090

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