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Characterization of vapor phase deposited organic molecules on silicon surfaces

✍ Scribed by S. Dieckhoff; R. Höper; V. Schlett; T. Gesang; W. Possart; O.-D. Hennemann; J. Günster; V. Kempter


Publisher
Springer
Year
1997
Tongue
English
Weight
273 KB
Volume
358
Category
Article
ISSN
1618-2650

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✍ Hall, L. H.; Sees, J. A.; Schmidt, B. L. 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 606 KB

Vapor phase decomposition-droplet surface etching-graphite furnace atomic absorption spectroscopy (VPD-DSE-GFAAS) is discussed as a technique for the determination of low levels of metals in chemical oxides on silicon surfaces. The VPD-DSGGFAAS technique was found to be statistically equivalent to r