𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characterization of ultrathin zirconium oxide films on silicon using photoelectron spectroscopy

✍ Scribed by S Miyazaki; M Narasaki; M Ogasawara; M Hirose

Book ID
118564385
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
343 KB
Volume
59
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Growth and characterization of zirconium
Growth and characterization of zirconium oxide thin films on silicon substrate
✍ P.Y. Kuei; J.D. Chou; C.T. Huang; H.H. Ko; S.C. Su πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 843 KB

The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel