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Characterization of Ultrathin Dielectric Films With the Prism-Coupler Method

โœ Scribed by Kin Seng Chiang; Sin Yip Cheng; Qing Liu


Book ID
115372203
Publisher
Optical Society of America
Year
2007
Tongue
English
Weight
248 KB
Volume
25
Category
Article
ISSN
0733-8724

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## Abstract A coplanar waveguide linear resonator technique for the experimental characterization of the dielectric properties of films in the microwave frequency range at room temperature is proposed. The approach is simple to implement as it consists of a film with unknown high dielectric constan