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Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

✍ Scribed by J.M. Leng; J. Chen; J. Fanton; M. Senko; K. Ritz; J. Opsal

Book ID: 114086329
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 205 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00838-9

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