✦ LIBER ✦
Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry : Leng, J.M.; Sidorowich, JJ.; Yoon, Y.D.; Opsal, Y.D.; Lee, B.H.; Cha, G.; Moon, J.; Lee, S.I. Journal of Applied Physics, Vol. 81, No. 8, pp. 3570–3578 (1997)
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 135 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0963-8695
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