Simultaneous measurement of six layers in a silicon on insulator film stack using visible-near-IR spectrophotometry and single-wavelength beam profile reflectometry

✍ Scribed by J.M. Leng; J.J. Sidorowich; M. Senko; J. Opsal

• Book ID: 114086323
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 339 KB
• Volume: 313-314
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(97)00831-6