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Characterization of TiN films grown by reactive d.c. triode sputtering onto copper substrates

โœ Scribed by S. Benhenda; J.M. Guglielmacci; M. Gillet


Book ID
103954928
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
570 KB
Volume
34
Category
Article
ISSN
0921-5107

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