Electron microscopy characterization of
Electron microscopy characterization of TiN films on Si, grown by d.c. reactive magnetron sputtering
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B. Pรฉcz; N. Frangis; S. Logothetidis; I. Alexandrou; P.B. Barna; J. Stoemenos
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Article
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1995
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Elsevier Science
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English
โ 986 KB