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Characterization of TiN coatings prepared by ion-beam-enhanced deposition

✍ Scribed by X.Y. Li; F.J. Wang; T.C. Ma; Y.K. Wang

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 332 KB
Volume: 139
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(91)90621-s

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