Post-deposition treatments of hard coatings Part II: Ion beam treatments of TiN and related coatings

✍ Scribed by Rafael R. Manory; Li J. Liu; Dinesh K. Sood; Zhi M. Shao; Carina Kylner; Manuel Braun

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 791 KB
• Volume: 70
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(94)90067-1