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Characterization of thin Si1On surface layers on Si by proton and alpha particle backscattering

✍ Scribed by V. Havránek; V. Hnatowicz; J. Kvítek; I. Obrusník; V. Rybka; V. Švorčik

Book ID: 113283397
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 269 KB
Volume: 68
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)96080-i

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