Characterization of the electrical properties and thickness of thin epitaxial semiconductor layers by THz reflection spectroscopy

✍ Scribed by Hashimshony, D.; Geltner, I.; Cohen, G.; Avitzour, Y.; Zigler, A.; Smith, C.

• Book ID: 121510637
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 216 KB
• Volume: 90
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1412574