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Characterization of subsurface damage in GaAs processed by Ga+ focused ion-beam-assisted Cl2 etching using photoluminescence

✍ Scribed by Taneya, M.; Sugimoto, Y.; Akita, K.

Book ID: 121736302
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 978 KB
Volume: 66
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.344439

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