Al-Cr-O layers were synthesized by reactive cathodic arc evaporation utilizing DC as well as pulsed operation of the arc sources. The observed increase of the substrate ion current in the pulsed mode is attributed to the increased ionization of the oxygen reactive gas. The influence of the substrate
β¦ LIBER β¦
Characterization of quaternary (Cr,Al)N-based films synthesized by the cathodic arc method
β Scribed by H. Hasegawa; K. Ohashi; S. Tsukamoto; T. Sato; T. Suzuki
- Book ID
- 104094040
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 632 KB
- Volume
- 202
- Category
- Article
- ISSN
- 0257-8972
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