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Approaches to influence the microstructure and the properties of Al–Cr–O layers synthesized by cathodic arc evaporation

✍ Scribed by Leandro de Abreu Vieira; Max Döbeli; Alex Dommann; Eva Kalchbrenner; Antonia Neels; Jürgen Ramm; Helmut Rudigier; Jürgen Thomas; Beno Widrig

Book ID
104094698
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
515 KB
Volume
204
Category
Article
ISSN
0257-8972

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✦ Synopsis

Al-Cr-O layers were synthesized by reactive cathodic arc evaporation utilizing DC as well as pulsed operation of the arc sources. The observed increase of the substrate ion current in the pulsed mode is attributed to the increased ionization of the oxygen reactive gas. The influence of the substrate ion current and the oxygen flow on the microstructure of the layers has been investigated. A strong influence of the oxygen gas flow on morphology and crystal structure has been observed. The increased substrate ion current in the pulsed mode has seemingly no influence on layer morphology at low bias voltages, but influences the nucleation behavior of the layer. The appearance of a multi-layer structure in the synthesized layers utilizing a single composite target has been ascribed to partial ion splitting of the target constituents in the curvilinear arc discharge.

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Correlation between target surface and l
Correlation between target surface and layer nucleation in the synthesis of Al–Cr–O coatings deposited by reactive cathodic arc evaporation
✍ Jürgen Ramm; Antonia Neels; Beno Widrig; Max Döbeli; Leandro de Abreu Vieira; Al 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 911 KB

The deposition parameters of reactive cathodic arc are correlated with processes at the surface of the composite Al-Cr targets and the nucleation and phase formation of the synthesized Al-Cr-O layers. The oxygen pressure and the pulsed operation of the arc current influence the formation of intermet