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Characterization of PZT thick films fabricated by micro-pen direct-writing

✍ Scribed by Yangyang Zhang, Huaqin Jiang, Jinping Zhang…


Book ID
120681641
Publisher
Springer US
Year
2013
Tongue
English
Weight
754 KB
Volume
24
Category
Article
ISSN
0957-4522

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## Abstract Optical waveguides based on benzocyclobutene polymer are fabricated by electron‐beam direct writing without etching. The propagation losses of waveguide measured at 1.55 μm for both TE and TM polarizations are 0.76 and 0.86 dB/cm, respectively. Moreover, the characteristics of waveguide