✦ LIBER ✦

Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy

✍ Scribed by A. Dominget; J. Farkas; S. Szunerits

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 329 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2006.10.035

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of post-copper CMP surf

Characterization of post-copper CMP surfaces with scanning probe microscopy: Part 1: Surface leakage measurement with conductive atomic force microscopy

✍ A. Dominget; J. Farkas; S. Szunerits 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 270 KB

Surface properties of oxidized LDPE by s

Surface properties of oxidized LDPE by scanning force microscopy with chemically modified probes

✍ Holger Schönherr; G. Julius Vancso 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 334 KB 👁 1 views

In this article, we present the results of a study on the surface properties of chromic acid-oxidized low-density polyethylene (LDPE) by scanning force microscopy (SFM) and contact angle measurements. LDPE films were surface modified by a chromic acid treatment with subsequent annealing in argon and

Surface potential mapping of biased pn j

Surface potential mapping of biased pn junction with kelvin probe force microscopy: application to cross-section devices

✍ A. Doukkali; S. Ledain; C. Guasch; J. Bonnet 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 232 KB

Oxygen interaction of CdS-based gas sens

Oxygen interaction of CdS-based gas sensors with different stoichiometric compositions was studied by X-ray photoelectron spectroscopy (XPS) and thermal-desorption mass spectroscopy observations combined with conductivity measurements. Three different types of film with different atomic ratios of Cd/S were used in the study of oxygen chemisorption in a low-temperature range between 300 and 570 K. Spray pyrolysis was used for the deposition of the films on glass substrates; XPS and energy dispersive spectroscopy of X-ray together with atomic force microscopy and scanning electron microscopy were used for the characterization of the composition and structure of the films. It was possible to distinguish different temperature ranges for the thermal desorption of the different adsorbed oxygen species. A comparison of the data from XPS and mass-spectroscopy observations with conductance measurements allows to conclude that metallic surface atoms are responsible for different interactions of oxygen species with CdS surfaces.

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB