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Characterization of post-copper CMP surfaces with scanning probe microscopy: Part 1: Surface leakage measurement with conductive atomic force microscopy

✍ Scribed by A. Dominget; J. Farkas; S. Szunerits

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 270 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.09.018

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