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Characterization of phosphosilicate glass films obtained using plasma-enhanced chemical vapor deposition from tetraethylorthosilicate and trimethylphosphite

✍ Scribed by Cynthia L. Pillote; Frank A. Shemansky; Timothy S. Cale; Gregory B. Raupp

Book ID: 107864317
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 631 KB
Volume: 236
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90684-h

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