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Characterization of nucleation and growth of MW-CVD diamond films by spectroscopic ellipsometry and ion beam analysis methods

✍ Scribed by Pintér, I.; Petrik, P.; Szilágyi, E.; Kátai, Sz.; Deák, P.

Book ID: 121267159
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 972 KB
Volume: 6
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(97)00029-0

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## Abstract Thin polycrystalline diamond films were synthesized on silicon substrate by Hot Filament Chemical Vapor Deposition (HF CVD) technique from a mixture of hydrogen and different content of methyl alcohol. A comparative study on the Electron Paramagnetic Resonance (EPR), Raman spectroscopy