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Characterization of indium–tin oxide films by means of ion-implanted nuclear probes

✍ Scribed by H Metzner; S Habenicht; Th Hahn; M Uhrmacher; K.-P Lieb; D Borchert; R Job; W.R Fahrner


Book ID
108389247
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
173 KB
Volume
317
Category
Article
ISSN
0040-6090

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Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic