Characterization of Heteroepitaxial Silicon Layers on Sapphire by Rutherford-Backscattering (RBS) Analyses

✍ Scribed by Schneider, H. G. ;Karge, H. ;Weber, B.

• Book ID: 105376887
• Publisher: John Wiley and Sons
• Year: 1983
• Tongue: English
• Weight: 360 KB
• Volume: 77
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210770124