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Characterization of focused electron beam induced carbon deposits from organic precursors

✍ Scribed by Tristan Bret; Sebastien Mauron; Ivo Utke; Patrik Hoffmann

Book ID: 108207429
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 381 KB
Volume: 78-79
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.01.006

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