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Characterization of fluorine-doped silicon dioxide film by Raman spectroscopy

✍ Scribed by M. Yoshikawa; K. Iwagami; N. Morita; T. Matsunobe; H. Ishida


Book ID
108389211
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
314 KB
Volume
310
Category
Article
ISSN
0040-6090

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